EtO Sterilization is a low-temperature process (typically between 37 and 63C)that uses Ethylene Oxide gas to reduce the level of infectious agents. EtO is usedin gas form and is usually mixed with other substances, such as CO2or steam.It is mainly usedfor products that cannot withstand the heat of typical autoclave sterilization such as plastic. The main physical parameters to be monitored are temperature and relative humidity.